{"type": {"key": "/type/work"}, "title": "Maikuro nano denshi b\u012bmu s\u014dchi ni okeru shink\u016b gijutsu", "subjects": ["Vacuum technology", "Vacuum metallurgy", "Vacuum microelectronics"], "authors": [{"type": {"key": "/type/author_role"}, "author": {"key": "/authors/OL5096561A"}}], "key": "/works/OL23945283W", "latest_revision": 1, "revision": 1, "created": {"type": "/type/datetime", "value": "2020-12-11T19:11:40.265248"}, "last_modified": {"type": "/type/datetime", "value": "2020-12-11T19:11:40.265248"}}