{"last_modified": {"type": "/type/datetime", "value": "2020-08-04T19:08:54.082976"}, "title": "Advanced Etch Technology for Nanopatterning IV", "created": {"type": "/type/datetime", "value": "2020-08-04T19:08:54.082976"}, "subjects": ["Lithography", "Etching"], "latest_revision": 1, "key": "/works/OL21110013W", "authors": [{"type": {"key": "/type/author_role"}, "author": {"key": "/authors/OL8032027A"}}], "type": {"key": "/type/work"}, "revision": 1}