An edition of Chemical mechanical polishing in silicon processing
(1999)
Chemical Mechanical Polishing in Silicon Processing, Volume 63 (Semiconductors and Semimetals)
- 0 Ratings
- 0 Want to read
- 0 Currently reading
- 0 Have read
Share
×Close
This edition doesn't have a description yet. Can you add one?
Check nearby libraries
Buy this book
Previews available in: English
Subjects
Silicon, Grinding and polishingShowing 1 featured edition. View all 1 editions?
| Edition | Availability |
|---|---|
1
Chemical Mechanical Polishing in Silicon Processing, Volume 63 (Semiconductors and Semimetals)
October 15, 1999, Academic Press
Hardcover
in English
0127521720 9780127521725
|
aaaa
Libraries near you:
WorldCat
|
Book Details
First Sentence
"Chemical mechanical planarization (CMP) has become, in a few short years, a required semiconductor processing module used in fabrication facilities worldwide."
The Physical Object
ID Numbers
Community Reviews (0)
Feedback?
| July 30, 2014 | Created by ImportBot | import new book |