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July 29, 2014 | History

Design and Manufacturing of Active Microsystems 1 edition

Design and Manufacturing of Active Microsystems
Stephanus Büttgenbach

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Design and Manufacturing of Active Microsystems
edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach

Published 2011 by Springer-Verlag Berlin Heidelberg in Berlin, Heidelberg .
Written in English.

Edition Notes

Microtechnology and MEMS

The Physical Object

[electronic resource] /

ID Numbers

Open Library
Internet Archive
9783642129025, 9783642129032

History Created July 29, 2014 · 1 revision Download catalog record: RDF / JSON

July 29, 2014 Created by ImportBot import new book