An edition of Proceedings of the First International Symposium on Chemical Mechanical Planarization (1997)

Proceedings of the First International Symposium on Chemical Mechanical Planarization

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Cover of: Proceedings of the First International Symposium on Chemical Mechanical Planarization by International Symposium on Chemical Mechanical Planarization (1st 1996 San Antonio, Tex.)
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Last edited by MARC Bot
November 26, 2020 | History
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An edition of Proceedings of the First International Symposium on Chemical Mechanical Planarization (1997)

Proceedings of the First International Symposium on Chemical Mechanical Planarization

by

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Electrochemical Society
Language
English
Pages
275

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Subjects
Congresses, Surfaces, Semiconductors, Pickling, Microelectronics, Metals, Materials, Grinding and polishing, Chemical mechanical planarization

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Edition Availability
Cover of: Proceedings of the First International Symposium on Chemical Mechanical Planarization
Proceedings of the First International Symposium on Chemical Mechanical Planarization
1997, Electrochemical Society
in English
  • Not in Library
Libraries near you: WorldCat

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Book Details

Published in

Pennington, NJ

Edition Notes

Includes bibliographical references and index.
"Electronics and Dielectric Science and Technology Divisions."
Held at the 190th meeting of the Electrochemical Society in San Antonio, Texas, Oct. 6-11, 1996.

Series
Proceedings / Electrochemical Society ;, v. 96-22, Proceedings (Electrochemical Society) ;, v. 96-22.

Classifications

Dewey Decimal Class
621.381
Library of Congress
TK7871 .I585 1996

The Physical Object

Pagination
ix, 275 p. :
Number of pages
275

ID Numbers

Open Library
OL287241M
ISBN 10
1566771722
LCCN
97190838
OCLC/WorldCat
36930230

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History

Download catalog record: RDF / JSON
November 26, 2020 Edited by MARC Bot import existing book
April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
January 31, 2010 Edited by WorkBot add more information to works
December 9, 2009 Created by WorkBot add works page