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January 29, 2010 | History

Tribology in chemical-mechanical planarization 1 edition

Tribology in chemical-mechanical planarization
Hong Liang

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Tribology in chemical-mechanical planarization
Hong Liang, David Craven.

Published 2005 by Taylor & Francis in Boca Raton, Fla .
Written in English.

Edition Notes

Includes bibliographical references and index.

Classifications

Dewey Decimal Class
621.9/2
Library of Congress
TJ1075 .L49 2005

The Physical Object

Pagination
185 p. :
Number of pages
185

ID Numbers

Open Library
OL22626705M
ISBN 10
0824725670
Goodreads
2512096

History Created December 11, 2009 · 2 revisions Download catalog record: RDF / JSON

January 29, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page