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Rapid thermal processing for future semiconductor devices
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Rapid thermal processing for future semiconductor devices
proceedings of the 2001 International Conference on Rapid Thermal Processing for Future Semiconductor Devices (RTP 2001), held at Ise-Shima, Mie, Japan, November 14-16, 2001
edited by Hisashi Fukuda.

Published 2003 by Elsevier in Amsterdam, Boston, London .
Written in English.

Edition Notes

Includes bibliographical references.

Genre
Congresses.

Classifications

Dewey Decimal Class
621.38152
Library of Congress
TK7871.85 .I58 2001

The Physical Object

Pagination
x, 150 p. :
Number of pages
150

ID Numbers

Open Library
OL22563204M
Internet Archive
rapidthermalproc00fuku
ISBN 10
0444513396

History Created December 11, 2009 · 2 revisions Download catalog record: RDF / JSON

January 29, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page