{"covers": [5406841], "first_publish_date": "2006", "latest_revision": 4, "key": "/works/OL12370088W", "authors": [{"type": {"key": "/type/author_role"}, "author": {"key": "/authors/OL5437456A"}}], "subjects": ["Congresses", "Design and construction", "Ultra large scale integration", "Integrated circuits", "Metallic films", "Metallizing", "Semiconductors", "Thin films", "Materials", "Integrated circuits, ultra large scale integration"], "created": {"type": "/type/datetime", "value": "2009-12-11T06:45:08.118659"}, "title": "Advanced Metallization Conference 2005 (AMC 2005)", "last_modified": {"type": "/type/datetime", "value": "2020-08-01T15:35:27.964416"}, "type": {"key": "/type/work"}, "revision": 4}