{"key": "/works/OL12349142W", "created": {"type": "/type/datetime", "value": "2009-12-11T06:41:56.669294"}, "title": "Integrated machine vision sensing for error-free semiconductor wafer handling", "first_publish_date": "1999", "latest_revision": 2, "last_modified": {"type": "/type/datetime", "value": "2010-01-23T05:35:00.471024"}, "authors": [{"type": "/type/author_role", "author": {"key": "/authors/OL5422011A"}}], "type": {"key": "/type/work"}, "id": 47517287, "revision": 2}