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January 23, 2010 | History

Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses 1 edition

Chemical-mechanical polishing of low dielectric constant polymers and ...
Christopher L. Borst

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Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
fundamental mechanisms and application to IC interconnect technology
by Christopher L. Borst, William N. Gill, Ronald J. Gutmann.

Published 2002 by Kluwer Academic Publishers in Boston .
Written in English.

Edition Notes

Includes bibliographical references and index.

Classifications

Library of Congress
TK7874.53 .B67 2002, TK7874.53 .B67 2002

The Physical Object

Pagination
xiv, 229 p. :
Number of pages
229

ID Numbers

Open Library
OL18179337M
ISBN 10
1402071930
LC Control Number
2002028782
Goodreads
3013313

History Created December 11, 2009 · 2 revisions
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January 23, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page