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Cover of: Proceedings of ISSM2000 | IEEE International Symposium on Semiconductor Manufacturing (9th 2000 Tokyo, Japan)

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Proceedings of ISSM2000
the Ninth [IEEE] International Symposium on Semiconductor Manufacturing : September 26-28, 2000, Hotel East 21 Tokyo, Tokyo, Japan
sponsored by, UCS, IEEE EDS, SEMI ... [et al.].

Published 2000 by IEEE, Ultra Clean Society in [Piscataway, New Jersey], Tokyo, Japan .
Written in English.

Edition Notes

"IEEE CATALOG NUMBER: 00CH37130"--verso of T.p.

Includes bibliographic references.

English with some material in Japanese.

Other Titles
International Symposium on Semiconductor Manufacturing., ISSM2000.

The Physical Object

xvii, 449, 10 p. :
Number of pages

ID Numbers

Open Library
0780373928, 0780364058, 0780364066

History Created December 11, 2009 · 3 revisions Download catalog record: RDF / JSON

April 28, 2010 Edited by Open Library Bot Linked existing covers to the work.
January 23, 2010 Edited by WorkBot add more information to works
December 11, 2009 Created by WorkBot add works page