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December 11, 2009 | History

A study of reactive sputter etching by directed ion beams and R.F. plasmas 1 edition

A study of reactive sputter etching by directed ion beams and R.F. pla ...
Peter James Revell

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A study of reactive sputter etching by directed ion beams and R.F. plasmas.

Published 1982 by [Unpublished thesis] in [London] .
Written in English.

Edition Notes

Thesis (Ph.D.) - Council for National Academic Awards 1982.

Classifications

Dewey Decimal Class
621.38173

The Physical Object

Pagination
[254]p. :
Number of pages
254

ID Numbers

Open Library
OL13713111M

History

Download catalog record: RDF / JSON
December 11, 2009 Created by WorkBot add works page