An edition of The Eleventh Annual International Workshop on Micro Electro Mechanical Systems (1998)

The Eleventh Annual International Workshop on Micro Electro Mechanical Systems

an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany

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Last edited by MARC Bot
January 22, 2026 | History
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An edition of The Eleventh Annual International Workshop on Micro Electro Mechanical Systems (1998)

The Eleventh Annual International Workshop on Micro Electro Mechanical Systems

an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany

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Publish Date
Publisher
Institute of Electrical and Electronics Engineers
Language
English
Pages
666

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Subjects

Congresses Microelectromechanical systems Microactuators Detectors
Edition Availability
Cover of: The Eleventh Annual International Workshop on Micro Electro Mechanical Systems
The Eleventh Annual International Workshop on Micro Electro Mechanical Systems: an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany
1998, Institute of Electrical and Electronics Engineers
in English

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Book Details

Edition Notes

Includes bibliographical references and indexes.
"IEEE catalog number 98CH36176."

Published in
[New York]
Other Titles
Micro electro mechanical systems, Investigation of micro structures, sensors, actuators, machines and robots

Classifications

Dewey Decimal Class
621.3
Library of Congress
TK7875 .I35 1998

The Physical Object

Pagination
xxx, 666 p. :
Number of pages
666

Edition Identifiers

Open Library
OL461234M
ISBN 10
078034412X, 0780344138, 0780344146
LCCN
98179821
Goodreads
4021954

Work Identifiers

Work ID
OL2206678W

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