Surface chemical cleaning and passivation for semiconductor processing

symposium held April 13-15, 1993, San Francisco, California, U.S.A.

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read
Not in Library

My Reading Lists:

Create a new list

Check-In

×Close
Add an optional check-in date. Check-in dates are used to track yearly reading goals.
Today

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

Buy this book

Last edited by MARC Bot
July 23, 2024 | History

Surface chemical cleaning and passivation for semiconductor processing

symposium held April 13-15, 1993, San Francisco, California, U.S.A.

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

This edition doesn't have a description yet. Can you add one?

Publish Date
Language
English
Pages
518

Buy this book

Edition Availability
Cover of: Surface chemical cleaning and passivation for semiconductor processing

Add another edition?

Book Details


Edition Notes

Includes bibliographical references and index.

Published in
Pittsburgh, PA
Series
Materials Research Society symposium proceedings ;, v. 315, Materials Research Society symposia proceedings ;, v. 315.

Classifications

Dewey Decimal Class
621.3815/2
Library of Congress
TK7871.85 .S9155 1993

The Physical Object

Pagination
xi, 518 p. :
Number of pages
518

ID Numbers

Open Library
OL1418888M
ISBN 10
1558992138
LCCN
93028784
OCLC/WorldCat
502599567
Goodreads
2739511

Community Reviews (0)

Feedback?
No community reviews have been submitted for this work.

Lists

This work does not appear on any lists.

History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
July 23, 2024 Edited by MARC Bot import existing book
November 16, 2020 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 13, 2010 Edited by Open Library Bot Linked existing covers to the edition.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record