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Last edited anonymously
April 30, 2008 | History
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Anthony F. Bernhardt

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  • Cover of: In-Situ Patterning : : Volume 158: Selective Area Deposition and Etching

    First published in 2014 1 edition in 1 language
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  • Cover of: In-Situ Patterning: Selective Area Deposition and Etching : Symposium Held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. (Materials Research Society Symposium Proceedings)

    First published in 1990 1 edition in 1 language
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Subjects
Lasers, industrial applications, Plasma etching, Semiconductors

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ID Numbers

  • OLID: OL3040266A

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History

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April 30, 2008 Created by an anonymous user initial import