An edition of Optical/laser microlithography IV (1991)

Optical/laser microlithography IV

6-8 March 1991, San Jose, California

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Cover of: Optical/laser microlithography IV by Victor Pol, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
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Last edited by MARC Bot
April 4, 2019 | History
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An edition of Optical/laser microlithography IV (1991)

Optical/laser microlithography IV

6-8 March 1991, San Jose, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
754

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Previews available in: English

Subjects
Optical instruments, Congresses, Microlithography, Lasers, Industrial applications

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Edition Availability
Cover of: Optical/laser microlithography IV
Optical/laser microlithography IV: 6-8 March 1991, San Jose, California
1991, SPIE
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
Bellingham, Wash., USA
Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1463, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1463.
Other Titles
Optical/laser microlithography four., Optical/laser microlithography 4.

Classifications

Dewey Decimal Class
621.36/6
Library of Congress
TA1677 .O67 1991

The Physical Object

Pagination
xii, 754 p. :
Number of pages
754

ID Numbers

Open Library
OL1569585M
Internet Archive
opticallasermicr1463unse
ISBN 10
0819405620
LCCN
91061056
Goodreads
4034979

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April 4, 2019 Created by MARC Bot import existing book