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34
authors
Harry J. Levinson
2
Hyongsok T. Soh
2
Larry F. Thompson
2
Alfred Kwok-Kit Wong
1
Banqiu Wu
1
Benjamin G. Eynon
1
subjects
Microlithography
[x]
Science/Mathematics
23
Technology & Industrial Arts
17
Technology
14
Congresses
12
Integrated circuits
10
publication date
2000–now
20
1980-1999
14
languages
English
33
Korean
1
publishers
Springer
5
Amer Chemical Society
3
An American Chemical Society Publication
3
CRC
3
Cambridge University Press
2
Noyes Publications
2
Handbook of VLSI microlithography
Noyes Publications/William Andrew Pub., 2000
Alternative lithography
Kluwer Academic/Plenum, 2003
Resolution enhancement techniques in optical lithography
by
Alfred Kwok-Kit Wong
SPIE Optical Engineering Press, 2001
Sub-half-micron lithography for ULSIs
Cambridge University Press, 2000
Principles of lithography
by
Harry J. Levinson
SPIE Press, 2001
50nm-kŭp chʻa sedae lisogŭraepʻi kisul kaebal saŏp =
ETRI, Chŏngbo Tʻongsinbu, 2005
Optical Microlithography II: Technology for the 1980s
Society of Photo Optical, December 1983 Paperback
Scanning probe lithography
by
Hyongsok T. Soh
Kluwer Academic Publishers, 2001
Optical lithography
SPIE Optical Engineering Press, 2002
Handbook of VLSI Microlithography
Noyes Publications, February 1, 1992 Hardcover
Materials for Microlithography
by
Larry F. Thompson
,
C. G. Willson
Amer Chemical Society, July 1985 Hardcover
Electronic and Photonic Applications of Polymers: Developed from a Symposium Sponsored by the Division of Polymeric Materials
by
Murrae Bowden
Amer Chemical Society, October 1988 Hardcover
Introduction to Microlithography
by
Larry F. Thompson
Amer Chemical Society, May 1983 Hardcover
Nanolithography and patterning techniques in microelectronics (Woodhead Publishing in Materials)
by
David G. Bucknall
CRC, October 11, 2005 Hardcover
Electron Optical Systems for Microscopy, Microanalysis and Microlithography
by
Sudha A. Bhatt
,
M.D.) Pfefferkorn Conference 1984 (Ocean City
Scanning Microscopy Intl, December 1984 Hardcover
Laser Microfabrication
Academic Press, May 28, 1989 Hardcover
Microlithography/Molecular Imprinting (Advances in Polymer Science)
Springer, July 21, 2005 Hardcover
Alternative Lithography
by
C.M. Sotomayor Torres
Springer, December 31, 2003 Hardcover
Fundamental Principles of Optical Lithography
by
Chris Mack
Wiley, January 18, 2008 Paperback
Semiconductor Lithography
by
Wayne M. Moreau
Springer, December 31, 1987 Paperback
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