An edition of Microlithography (1998)

Microlithography

science and technology

by , , and

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Cover of: Microlithography by edited by James R. Sheats, Bruce W. Smith.
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Last edited by ImportBot
August 4, 2023 | History
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An edition of Microlithography (1998)

Microlithography

science and technology

by , , and

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
Marcel Dekker
Language
English
Pages
780

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Previews available in: English

Subjects
Complementary Metal oxide semiconductors, Integrated circuits, Manufacturing processes, Microlithography, Industrial applications, Masks, Design and construction, Metal oxide semiconductors, complementary

Showing 6 featured editions. View all 6 editions?

Edition Availability
Cover of: Microlithography
Microlithography: Science and Technology, Second Edition
2018, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Microlithography
Microlithography: Science and Technology, Second Edition
2018, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Microlithography
Microlithography: Science and Technology, Second Edition
2018, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Microlithography
Microlithography: Science and Technology. Optical Science and Engineering Series, Volume 126
2010, Taylor & Francis Group
in English
Libraries near you: WorldCat
Cover of: Microlithography
Microlithography: Science and Technology
2007, CRC Press LLC
in English
Libraries near you: WorldCat
Cover of: Microlithography
Microlithography: science and technology
1998, Marcel Dekker
in English
Libraries near you: WorldCat

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Book Details

Edition Notes

Includes bibliographical references and index.

Published in
New York

Classifications

Dewey Decimal Class
621.3815/31
Library of Congress
TK7836 .M525 1998, TK7836.M525 1998

The Physical Object

Pagination
xii, 780 p. :
Number of pages
780

ID Numbers

Open Library
OL356842M
Internet Archive
isbn_9780824799533
ISBN 10
0824799534
LCCN
98016713
Library Thing
1761388
Goodreads
3836700

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
August 4, 2023 Edited by ImportBot import existing book
December 22, 2022 Edited by ImportBot import existing book
September 17, 2021 Edited by ImportBot import existing book
November 28, 2020 Edited by MARC Bot import existing book
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record.