An edition of Optical/laser microlithography IV (1991)

Optical/laser microlithography IV

6-8 March 1991, San Jose, California

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Cover of: Optical/laser microlithography IV by Victor Pol, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
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Last edited by ImportBot
June 19, 2023 | History
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An edition of Optical/laser microlithography IV (1991)

Optical/laser microlithography IV

6-8 March 1991, San Jose, California

  • 0 Ratings
  • 0 Want to read
  • 0 Currently reading
  • 0 Have read

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Publish Date
Publisher
SPIE
Language
English
Pages
754

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Previews available in: English

Subjects
Optical instruments, Congresses, Microlithography, Lasers, Industrial applications

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Edition Availability
Cover of: Optical/laser microlithography IV
Optical/laser microlithography IV: 6-8 March 1991, San Jose, California
1991, SPIE
in English
Libraries near you: WorldCat

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Book Details

Published in

Bellingham, Wash., USA

Edition Notes

Includes bibliographical references and index.

Series
Proceedings / SPIE--the International Society for Optical Engineering ;, v. 1463, Proceedings of SPIE--the International Society for Optical Engineering ;, v. 1463.
Other Titles
Optical/laser microlithography four., Optical/laser microlithography 4.

Classifications

Dewey Decimal Class
621.36/6
Library of Congress
TA1677 .O67 1991

The Physical Object

Pagination
xii, 754 p. :
Number of pages
754

ID Numbers

Open Library
OL1569585M
Internet Archive
opticallasermicr1463unse
ISBN 10
0819405620
LCCN
91061056
Goodreads
4034979

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History

Download catalog record: RDF / JSON / OPDS | Wikipedia citation
June 19, 2023 Edited by ImportBot import existing book
November 13, 2020 Edited by MARC Bot import existing book
April 4, 2019 Edited by MARC Bot import existing book
April 16, 2010 Edited by bgimpertBot Added goodreads ID.
April 1, 2008 Created by an anonymous user Imported from Scriblio MARC record.