{"languages": [{"key": "/l/eng"}], "physical_format": "Hardcover", "subtitle": "Proceedings of the First Pfefferkorn Conference", "last_modified": {"type": "/type/datetime", "value": "2008-04-29 15:03:11.581851"}, "publishers": ["Scanning Microscopy Intl"], "number_of_pages": 372, "id": 11346477, "isbn_13": ["9780931288302"], "isbn_10": ["0931288304"], "publish_date": "June 1984", "key": "/b/OL8383841M", "authors": [{"key": "/a/OL2949573A"}, {"key": "/a/OL2949574A"}], "title": "Electron Beam Interactions With Solids for Microscopy, Microanalysis, and Microlithography", "type": {"key": "/type/edition"}, "subjects": ["Solids", "Backscattering", "Science/Mathematics", "Congresses", "Effect of radiation on", "Electron beams", "Electrons"], "revision": 1}