Microlithography

Science and Technology, Second Edition (Opitcal Science and Engineering)

Published in May 11, 2007, CRC

Microlithography

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Contributions:	Kazuaki Suzuki (Editor), Bruce W. Smith (Editor)
Language:	English
Edition:	2 edition
Format:	Hardcover
Dimensions:	10 x 7.3 x 1.8 inches
Weight:	4.2 pounds
ISBN 10:	0824790243
ISBN 13:	9780824790240
Subject:	Circuits & components Science/Mathematics Technology Technology & Industrial Arts Electronics - Microelectronics Engineering - Electrical & Electronic Manufacturing Technology / Lasers Lasers Engineering - General Design and construction Industrial applications Integrated circuits Masks Metal oxide semiconductors, Complementary Microlithography