{"isbn_13": ["9780824790240"], "physical_format": "Hardcover", "subtitle": "Science and Technology, Second Edition (Opitcal Science and Engineering)", "weight": "4.2 pounds", "languages": [{"key": "/l/eng"}], "type": {"key": "/type/edition"}, "publishers": ["CRC"], "number_of_pages": 864, "id": 11054339, "edition_name": "2 edition", "isbn_10": ["0824790243"], "publish_date": "May 11, 2007", "key": "/b/OL8160615M", "last_modified": {"type": "/type/datetime", "value": "2008-04-29 15:03:11.581851"}, "title": "Microlithography", "contributions": ["Kazuaki Suzuki (Editor)", "Bruce W. Smith (Editor)"], "subjects": ["Circuits & components", "Science/Mathematics", "Technology", "Technology & Industrial Arts", "Electronics - Microelectronics", "Engineering - Electrical & Electronic", "Manufacturing", "Technology / Lasers", "Lasers", "Engineering - General", "Design and construction", "Industrial applications", "Integrated circuits", "Masks", "Metal oxide semiconductors, Complementary", "Microlithography"], "physical_dimensions": "10 x 7.3 x 1.8 inches", "revision": 1}