{"isbn_13": ["9780824705060"], "physical_format": "Hardcover", "weight": "3.7 pounds", "languages": [{"key": "/l/eng"}], "publishers": ["CRC"], "number_of_pages": 896, "last_modified": {"type": "/type/datetime", "value": "2008-04-29 15:03:11.581851"}, "id": 11008554, "first_sentence": {"type": "/type/text", "value": "Metrology is an exciting field that requires a background in both semiconductor fabrication (process) and measurement technology and physics."}, "isbn_10": ["0824705068"], "publish_date": "June 29, 2001", "key": "/b/OL8124692M", "authors": [{"key": "/a/OL2870622A"}], "title": "Handbook of Silicon Semiconductor Metrology", "type": {"key": "/type/edition"}, "subjects": ["Electricity, magnetism & electromagnetism", "Semi-conductors & super-conductors", "Semiconductors", "Electronic Measurements", "Technology", "Technology & Industrial Arts", "Science/Mathematics", "Electronics - Semiconductors", "Engineering - Electrical & Electronic", "Technology / Electronics / General", "Inspection", "Measurement"], "physical_dimensions": "10.1 x 7.3 x 1.8 inches", "revision": 1}